Application of TTJ temperature tester in the semiconductor industry: providing data verification for

The semiconductor industry has high requirements for the stability of production processes.

Processes such as wafer treatment, annealing, diffusion, oxidation, and sintering, welding, and curing during packaging all involve temperature changes.

Although semiconductor equipment itself is usually equipped with temperature control systems, the displayed by the equipment is mainly used for equipment control and cannot fully represent the actual temperature experienced by the product.

Therefore, many equipment engineers also need to verify actual temperature of the equipment through professional furnace temperature testing equipment.

The TTJ furnace temperature tester is an important tool used for this actual temperature testing.

What can theJ furnace temperature tester help engineers do?

The TTJ furnace temperature tester can connect multiple thermocouples, set temperature measurement points at different locations inside the equipment, and record the temperature changes at multiple locations.

After the test is completed, the actual temperature state of the equipment is analyzed through curve analysis.

Engineers can focus checking:

 Actual maximum temperature

 Heating rate

 Temperature holding time

 Temperature fluctuation

 Temperature difference between different locations

 Overall temperature curve

These data can provide a reference equipment verification and process analysis.

 1. New equipment acceptance

After the installation of new equipment is completed, in addition to checking whether the equipment can operate normally it is also necessary to understand the actual temperature in different areas inside the furnace.

Using the TTJ furnace temperature tester for multi-point testing can help engineers determine the temperature distribution inside the equipment meets expectations.

 2. Verifying furnace temperature uniformity

Semiconductor thermal processes usually have high requirements for temperature stability.

If there a significant temperature difference at different locations inside the equipment, it may cause the product to experience different heat treatment conditions.

The TTJ furnace temperature tester can simultaneously present temperature changes at different locations on the curve through multi-channel synchronous testing.

 3. Verification after equipment maintenance

After equipment maintenance, replacement of heating components, or of temperature control parameters, one cannot only look at whether the control system display is normal.

Re-testing with the TTJ furnace temperature tester allows for a of the curves before and after maintenance to understand whether the temperature state of the equipment has changed.

 4. Assisting in the analysis of process abnormalities

When product abnormalities, engineers need to troubleshoot from multiple aspects such as equipment, materials, and processes.

If temperature problems are suspected, the TTJ furnace temperature tester can be used testing.

By comparing the temperature curves in normal and abnormal states, engineers can help determine whether temperature changes exist.

 5. Establishing equipment temperature archives

For important production equipment the TTJ furnace temperature tester can be used regularly for testing, and historical data can be saved.

After long-term accumulation, a record of equipment temperature changes can formed.

When subsequent abnormalities occur, comparative analysis can be performed through the historical data.

Why does the semiconductor industry need professional furnace temperature testers?

Sem thermal processes focus not just on a single temperature figure, but on the entire temperature process.

The TTJ furnace temperature tester can record the temperature changes inside the equipment as curves, allowing engineers to understand the actual temperature state more intuitively.

TTJ supports multi-channel temperature testing and features triple start, adjustable curves, etc., and be configured according to different equipment and testing requirements.

For those with special temperature ranges, channel numbers, or temperature measurement